Analysis of Boron with Energy Dispersive X-ray Spectrometry
Advances in Light Element Analysis with SDD Technology
- Spectra of Ni3B acquired at 2, 5, 10 and 15 kV (input count rate: 4-5 kcps, acquisition time: 60 s). The spectra were obtained with a Bruker XFlash SDD (Mn-Kα ≤ 123 eV, C-Kα ≤ 46 eV). Carbon (coating) and oxygen (minor oxidation) were not quantified, but taken into account for peak deconvolution. Sample: courtesy of U. Burkhardt, MPI Dresden, Germany.
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The analysis of light elements (from Be to F, refer to periodic table in fig. 1) presents a special challenge for energy dispersive X-ray spectrometry (EDS). Some of the problems are due to inherent physical effects, while others are technical in nature, relating to the design of the instrument used for analysis and the measurement procedure. Along with the demand for fast and efficient tools for analysis at the micro- and nanometer scale, the need for light element analysis with EDS has grown.
With the recent advances in EDS hardware and software, dramatic progress in the detection and quantification of light elements has been made. Specific examples for the analysis of boron are discussed in detail.