The analysis of light elements (from Be to F, refer to periodic table in fig. 1) presents a special challenge for energy dispersive X-ray spectrometry (EDS). Some of the problems are due to inherent physical effects, while others are technical in nature, relating to the design of the instrument used for analysis and the measurement procedure. Along with the demand for fast and efficient tools for analysis at the micro- and nanometer scale, the need for light element analysis with EDS has grown.
With the recent advances in EDS hardware and software, dramatic progress in the detection and quantification of light elements has been made. Specific examples for the analysis of boron are discussed in detail.
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