Sample Conductivity's Influence on Oxidation by the Tip of AFM

Sample Conductivity's Influence on Oxidation by the Tip of AFM. V. Cambel & J. Soltys at the Slovak Academy of Sciences, Bratislava, Slovakia analyzed the role of the electric field distribution in the nano-oxidation process realized by the tip of AFM experimentally and theoretically. Authors show the importance of the sample conductivity and the water bridge in the process applied to bulk GaAs and Ga[Al]As heterostructures in both contact and noncontact AFM modes and the consequences for the lines witten. They show that the electric field distribution in the system tip-sample is controlled by the sample conductivity. In the case of low-conductive samples, maximum field is located apart from the tip apex for both contact and noncontact AFM modes.

J. Appl. Phys. 102, 074315
doi:10.1063/1.2794374

Keywords: electric field distribution nano-oxidation process Sample Conductivity Slovak Academy of Sciences

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