Scintillation Detector for LV- SEM: P. Wandrol introduces a new scintillation detector of backscattered electrons that is capable of working at primary beam energy as low as 0.5 keV. Low energy backscattered electrons are accelerated in order to generate a sufficient number of photons. Secondary electrons are deflected back by the energy filter so that the true compositional contrast of the specimen is obtained. The author presents the theoretical models of the detector function and first demonstration images.
J. Micros. 227 (1) 24-29
Imaging & Microscopy Issue 1 , 2013 as free epaper or pdf download