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Advanced 3D Research and Development
Advanced 3D Research and Development: Combining FEI's latest advances in ion and electron optics and the unique environmental SEM technology of FEI's Quanta family of products, the new system eliminates the boundaries imposed by traditional high vacuum systems. The Quanta 3D FEG expands FEI's range of DualBeam solutions for NanoResearch and Industry, NanoBiology and NanoElectronics. The advances incorporated in the Quanta 3D provide users with new levels of versatility and flexibility. The system features high current ion column for rapid, site-specific cross-sections of samples to reveal sub-surface structures and features while the system's advanced electron source design delivers improved SEM imaging. Further increased electron beam current enables higher throughput spectroscopy.
Keywords: Advanced 3D Development Advanced 3D Research DualBeam solutions Fei Company NanoElectronics Nanoindustry NanoBiology NanoResearch Quanta SEM technology vacuum systems
Imaging & Microscopy Issue 4 as free epaper or pdf download
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