Products
Automated Sample Prep (ASaP) System
Self-contained Automatic Plasma Cleaning, Ion Beam Etching, Reactive Ion Etching, and Ion Beam Sputter Coating
The powerful and flexible Model 1030 Automated Sample Prep (ASaP) System prepares samples that have been created by cleaving, grinding, cutting, or sectioning. The final sample configuration is ideal for analysis in a scanning electron microscope (SEM).
Processing with the ASaP significantly enhances the image quality and analytical data obtained from the sample. Operation is fully programmable and automatic, completing sample preparation rapidly enough for high-throughput applications.
ASaP functions in one chamber
• Plasma Cleaning (PC)
• Ion Beam Etching (IBE)
• Reactive Ion Etching (RIE)
• Ion Beam Sputter Coating (IBSC)
Powerful automatic sample preparation
• Four functions in continuous vacuum.
• Rapid sample processing.
• Automatic operation with user-defined process sequence.
• Easy-to-use interface.
• Samples up to 1.0 in. (25mm) diameter and 1.0 in. (25mm) thick.
• Closed loop operation yields consistent results.
• Computer automation of instrument parameters.
• Automatic sample height detection.
• Rapidly pumped sample exchange load lock.
• Oil-free vacuum system.
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Keywords: E. A. Fischione Instruments High-Throughput Sample Preparation Scanning Electron Microscope SEM
E.A. Fischione Instr. Inc.
9003 Corporate Circle
Export, PA 15632
USA
Tel: +1 724 3255444
Fax: +1 724 3255443
Web: http://www.fischione.com
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