Big Vacuum Chamber, Deep Insights

Auriga 60 CrossBeam Workstation from Carl Zeiss SMT

Featuring an extraordinarily big vacuum chamber, the Auriga 60 reaches a new level of flexibility, ... more

Carl Zeiss SMT introduced a new family member of Auriga CrossBeam (FIB-SEM) workstation featuring a large six inch stage vacuum chamber and a total of 23 free accessory ports. The new AURIGA 60 platform essentially broadens the application spectrum of the Zeiss CrossBeam technology. Its vacuum chamber is large enough to handle wafers of up to six inch diameter, at the same time. The huge chamber offers the capability to attach up to 23 analytical or other attachments for diverse chemical or physical experiments. For example, external imaging and analytic detectors like EDX, EBSD and SIMS can be connected. In particular, the novel workstation permits a direct cryogenic transfer and examination of deep-frozen specimen. The extended range of utilization options is exceptionally useful in multi-purpose environments where several experimenters with different research objects share the workstation.
Besides, the Auriga 60 CrossBeam workstation is capable of being simply and very flexibly upgraded-depending on the overall necessities or budgetary requirements of the user. Thanks to a modular assembly of the system one can even start with a stand-alone high-performance FE-SEM platform which can be upgraded later on by stepwise integration of additional components like FIB column, detectors and a gas injection system for etching the sample surface or deposition of thin material layers-to finally have a fully equipped CrossBeam workstation

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Keywords: 3D Imaging Auriga Carl Zeiss Crossbeam Workstation EBSD EDX Electron and Ion Microscopy Electron Backscatter Diffraction FIB-SEM

Carl Zeiss Microscopy GmbH
Carl-Zeiss-Str. 56
73447 Oberkochen, Baden-Württemberg
Germany

Tel: +49 7364 20 22 94
Fax: +49 7364 20 4970
Web: http://www.zeiss.com/microscopy

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