Fei Company: Nova NanoSEM (SEM for Ultra-High Resolution Characterization). Fei Company released the newest member of its Nova family of SEM and Dual- Beam systems, the Nova NanoSEM. It is the world’s first low-vacuum, field emission scanning electron microscope (FEGSEM) solution for ultra-high resolution characterization of charging and/or contaminating samples such as organic materials, substrates, porous materials, plastics and polymers. This new system joins the company’s growing line of marketleading tools that are enabling nanoscale research, development and manufacturing in a diverse range of markets and applications. It brings new capabilities to researchers and developers working with non-conductive and contaminating nanoscale materials.
Keywords: FEGSEM Fei Company Nova NanoSEM

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