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Next Generation in Analytical EM
The Merlin - Emission Scanning Electron Microscope
Carl Zeiss announced launches of product and application innovations. The start of this series is marked by the next-generation analytical field emission scanning electron microscope - the Merlin. This instrument combines requirements of ultra-high resolution imaging and analytical capabilities. "Customers have a need for more than just high resolution images of their samples," Dr. Dirk Stenkamp, Member of the Board at Carl Zeiss SMT explains.
The core of Merlin is the enhanced Gemini II column which, with its double condenser system, achieves an image resolution of 0.8 nanometers. A sample current of up to 300 nanoamperes is available for analytical purposes such as energy and wavelength dispersive X-ray spectroscopy (EDS and WDS), diffraction analysis of backscattered electrons (EBSD) or the generation of cathodoluminescence. The system supports the user with a wide range of detailed solutions for tasks that could not be adequately performed in the past. The foundation for this achievement has been laid by the "Complete Detection System". This consists of the in-lens SE detector for surface imaging, the in-lens EsB detector for material contrast and the AsB detector for widely dispersed backscattered electrons. The latter contain specific information on the crystal orientation of the sample.
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Keywords: Analytical Electron Microscopy Carl Zeiss SMT detector EBSD EDS Electron and Ion Microscopy Electron Backscatter Diffraction Merlin
Carl Zeiss Microscopy - Nano Technology Systems
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