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Atomic Resolution
N8 Titanos for Large Sample
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Bruker Nano announced that its N8 Titanos large-sample inspection AFM has been further improved to provide high spatial resolving power. Due to its AFM technology and mechanical stability, the AFM has now been demonstrated with atomic-scale resolution on HOPG (highly oriented pyrolythic graphite) on a production instrument in standard configuration. The AFM has proven itself once again as the most precise and stable AFM platform for large samples up to 300 mm diameter.
The N8 Titanos has been developed for the inspection of 300 mm wafers, and it is also in use for metrology on solar panels, photolithography masks, flat panel displays, etc. The systems ultra-precise xy-positioning stage employs contact-less linear motors, high-resolution glass encoders and an air bearing for fast, reproducible sample movement. The system is mounted on a solid granite bridge above the platform. The N8 can be used as a stand-alone, automated system or combined with a high-performance optical microscope. It comes as a fully accessible R&D tool, or can be upgraded to an at-line production inspection system.
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Keywords: AFM Atomic Force Bruker large sample Microscope N8 Titanos
Bruker Nano GmbH
Schwarzschildstr. 12
12489 Berlin
Germany
Tel: +49 30 670 990 0
Fax: +49 30 670 990 30
Web: http://www.bruker-nano.de
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