Ultra-Fast Piezo Nanopositioning Stage

  • Physik InstrumentePhysik Instrumente

Nanometer precision and motion control industry company Physik Instrumente (PI) delivers solutions for very small position changes, coupled with speed and high force, in its P-630 nanopositioning stages.

With proven reliability of many billions of cycles, piezo actuators are being utilized in research and industry microstructuring and scanning applications, precision positioning of optical elements, and micromachining. The P-630 X-axis nanopositioning stage, with a large clear 30mm diameter aperture, 0.1nm resolution, a small footprint and low-profile, will ensure high accuracy and long life with travel ranges to 80µm. Equipped with an internal capacitive sensor that allows for precise, extremely stable motion, the stiff flexure design with a natural frequency of >3 kHz enables exceptional responsiveness and accuracy. A vacuum version is available.

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Contact

Physik Instrumente (PI) GmbH & Co.KG
Auf der Römerstr. 1
76228 Karlsruhe
Germany
Phone: +49 721 4846-0
Telefax: +49 721 4846-1019

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