A World Novelty in Electron Microscopy

Tescan Introduces FIBLYS

Sep. 14, 2010

Tescan FIBLYS more

FIBLYS (or FIB anaLYSis) is a project to design and build united nano-structuring, nano-manipulation, nano-analytic and nano-vision capabilities in one unique ‘multi-nano' tool. It is based on a dual Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) together with Atomic Force Microscope (AFM). FIB enables modification of samples, SEM fast real-time imaging while AFM provides the depth information. This core of excellent nano-vision ability is further improved by analytical capabilities combined in a modular system, such as Energy Dispersive X-ray Spectrometer (EDX), Electron Back-Scatter Diffraction (EBSD), Time-of-Flight Mass Spectrometry (TOF) and others. A variety of techniques also allow a 3D tomography approach based on sequential FIB slicing followed by analysis e.g. by EBSD and others and subsequent data-processing to create 3D objects with analytical information.
FIBLYS project represents a third European funded project for Tescan. Other partners include Institute of Photonic Technology in Jena, The Research and Development Institute for Information Technology Tools and Systems at the University of Oldenburg, Swiss Federal Laboratories for Materials Testing and Research, Laboratoire de Microscopies et d'Etude de Nanostructures at the University of Reims, private company Tofwerk from Switzerland manufacturing TOF spectrometers and company SmarAct from Germany which produces nano-manipulators.

For more information about FIBLYS please click here

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Tescan a.s
Libušina třída 21
623 00 Brno
Czech Republic

Tel: +420 547 130 411
Fax: +420 547 130 415
Web: http://www.tescan.com

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A World Novelty in Electron Microscopy

Tescan Introduces FIBLYS

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