Ultra plus

Ultra-High-Resolution Imaging of ­Non-Conductive Samples

Carl Zeiss, Ultra plus Scanning Electron Microscope more

Ceramics, polymers, fibre optics and many more samples are not really rewarding specimens for electron microscopy, due to electrostatic charging. Ultra plus Scanning Electron Microscope (SEM) with a technology for charge compensation enables high resolution, stable and noise-free images from such samples. This technological advancement was developed for satisfying increasing customer demands in analytical research, development and testing of advanced materials. For the purpose of charge neutralization, a proprietary gas-injection system enables for a local flush application of an inert gas. Thereby, electrostatic charging of samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Numerous applications in life sciences, materials analysis and semiconductors will profit from this development.

Complete Detection System in ULTRA plus
Using the new proprietary gas-injection system, both the use of the unique in-lens SE detector as well as the in-lens EsB detector (Energy selective Backscattered) of the industry-proven Zeiss Ultra field-emission SEM becomes possible. Thereby, for the first time non-conductive samples can be investigated in the microscope not only under low-voltage imaging conditions, but also at high voltage and high probe current to use the full functionality of the leading microscope capabilities. Together with the AsB (Angle selective Backscattered) detector for low-angle backscattered electrons revealing orientation contrast as well as the chamber-mounted Everhart Thornley detector for topographical contrast, the Ultra plus offers a complete detection system for all applications on conductive as well as non-conductive samples.

Keywords: Angle Selective Backscattered Backscattered Electrons Carl Zeiss ceramics Fibre Optics Polymers Scanning Electron Mircoscope Secondary Electrons SEM Ultra Plus

Carl Zeiss Microscopy GmbH
Carl-Zeiss-Str. 56
73447 Oberkochen, Baden-Württemberg
Germany

Tel: +49 7364 20 22 94
Fax: +49 7364 20 4970
Web: http://www.zeiss.com/microscopy

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