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X-Beam Micro-XRF inside the SEM
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Scanning electron microscopes are usually equipped with a variety of analytical accessories. The latest development in this respect is Integrated X-ray Fluorescence (IXRF) analysis using focused X-rays inside the SEM. IXRF utilizes the existing EDS hard- and software, required is just the X-Beam X-ray source with polycapillary optics and a software add-on. The main advantage is the low detection limit. Compared to excitation with an electron beam, excitation with an X-ray source significantly reduces the spectral background and allows trace analysis even in the ppm range. Samples do not have to be coated and penetration depths exceed that of the electron beam by 10 fold. This opens up analysis avenues for coating measurements and thin film analysis.
IXRF - a powerful completion for the analytical SEM.
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Keywords: EDS Hardware EDS Software Electron Beam IXRF SEM X-Beam Micro-XRF X-Ray Analysis X-ray Fluorescence Analysis
IXRF Systems
15715 Brookford Drive
Houston, TX 77059
USA
Tel: +1 281 2866485
Web: http://www.ixrfsystems.com
Imaging & Microscopy Issue 4 , 2012 as free epaper or pdf download
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