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The X-ray UltraMicroscope
The XuM is an SEM-hosted high resolution x-ray microscope which provides an internal view of the structure of samples without cross-sectioning. Providing 2D, stereo and full 3D tomographic imaging, the XuM adds the third dimension to scanning electron microscopy.
The XuM uses X-rays generated in an SEM chamber to penetrate suitably thin specimens and create images of their interior structure on a CCD camera. Modern SEM imaging and analytical capabilities allow the investigation of surface features only. Gatan's XuM provides a fully compatible technique to give information about the interior structure and distribution of material inside a sample. No modification to either the SEM or its specimen stage is required to switch between imaging modes. A high efficiency, 1340 x 1300 pixel X-ray camera is used for capturing the projection images. Up to 5 metal targets are held in a micro-positioning holder and moved under the electron beam to generate X-rays of different energies. This allows the operator to optimize X-ray penetration of the sample and provide sufficient intensity and absorption contrast on the CCD camera. The XuM high resolution 3D tomographic package allows automated acquisition of a rotation series of 2D sample images. A high precision tomographic stage with X-Y centering provides rotation steps of less than 0.5.
Keywords: 3D Imaging Gatan Ultra Microscope X-Ray XuM
Lead: Gatan Inc.
5794 W. Las Positas Blv 0
94588 Pleasanton, CA
USA
Tel: +1 925 463-0200
Fax: +1 925 4630204
Web: www.gatan.com
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