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Tensile Testing of Microstructures

Method to Study the Mechanical Properties of Microsamples

May. 13, 2011
Fig. 1: Tensile test set-up and measurement process. (A) Image of the tensile testing set-up inside of a dual beam SEM/FIB chamber. An AFM cantilever attached to a support (here a simple screw nut) is used as a force sensor. The micromanipulator probe can operate the tiny object (here a silver wire) such as picking up, moving, and pulling. (B) Schematic of the test method and steps: picking up a wire (C1); fixing the wire on the AFM cantilever by Pt ion-induced deposition (C2); loading the wire by moving away the probe (C3); breaking the wire (C4).
Fig. 1: Tensile test set-up and measurement process. (A) Image of the tensile testing set-up inside ... more
Fig. 1: Tensile test set-up and measurement process. (A) Image of the tensile testing set-up inside ... Fig. 2: Silver wire tensile testing. (A) FIB image of the wire before loading. The wire is fixed by ... Fig. 3: Wire deviation before and after tensile test. (A) and (B) Top-view SEM images of the wire ... Fig. 4: Pulling the wires attached to one edge of the AFM cantilevers. (A) and (B) Top-view of a ... Fig. 5: The principle of the tensile testing experiment and a resulting stress-strain curve. (A) ... 

Acknowledgements
The authors would like to thank Tobias Heiler for help creating the 3D graphics.

References
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Authors:
Dr. Torsten Scherer (corresponding author)
Dr. Sheng Zhong
Prof. Dr. Thomas Schimmel
Institute of Nanotechnology
Karlsruhe Institute of Technology
Germany

Dr. Sheng Zhong,
Prof. Dr.Thomas Schimmel
Institute of Applied Physics and Center for Functional Nanostructures (CFN)
Karlsruhe Institute of Technology
Germany

 

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Keywords: AFM Cantilever FIB AFM Cantilever Focussed Ion Beam (FIB) in-situ microscopy Manipulator Material Analysis MEMS Nanomechanics Nanotechnology Nanowires Scanning Electron Microscopy SEM Sheng Zhong Tensile Testing Thomas Schimmel Torsten Scherer

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