Sep. 17, 2010

Big Vacuum Chamber, Deep Insights

Carl Zeiss SMT introduced a new family member of Auriga CrossBeam (FIB-SEM) workstation featuring a large six inch stage vacuum chamber and a total of 23 free accessory ports. The new AURIGA 60 platform essentially broadens the application spectrum of the Zeiss CrossBeam technology. Its vacuum chamber is large enough to handle wafers of up to six inch diameter, at the same time. The huge chamber offers the capability to attach up to 23 analytical or other attachments for diverse chemical or physical experiments. moreNov. 17, 2009

Highly Flexible CrossBeam Workstation

To study the chemical analysis, crystallographic information, the complete morphology, electrical information of various FIB-SEM samples, the Auriga Workstation from Carl Zeiss NTS features redesigned vacuum chamber, which includes a total of 15 ports for different detectors. Additionally, a charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. more