Nov. 17, 2009

Highly Flexible CrossBeam Workstation

To study the chemical analysis, crystallographic information, the complete morphology, electrical information of various FIB-SEM samples, the Auriga Workstation from Carl Zeiss NTS features redesigned vacuum chamber, which includes a total of 15 ports for different detectors. Additionally, a charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. more