Nano-Imprint
Apr. 26, 2010
PI's P-563.3CD PIMars stage is a piezo flexure-guided scanning / nanomanipulation system. The unit enables precision motion control with resolution in the sub-nanometer realm and 340x340x340 µm travel in XYZ. Integrated, direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages. The product incorporate high-force solid state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors.
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