Jul. 10, 2011
The analysis of light elements (from Be to F, refer to periodic table in fig. 1) presents a special challenge for energy dispersive X-ray spectrometry (EDS). Some of the problems are due to inherent physical effects, while others are technical in nature, relating to the design of the instrument used for analysis and the measurement procedure. Along with the demand for fast and efficient tools for analysis at the micro- and nanometer scale, the need for light element analysis with EDS has grown.
moreNov. 03, 2009
The development of modern technology affects the science of small objects in two ways. On one hand better means for handling, imaging and analysis of miniature objects are provided, which means we can try and understand our world on a much smaller scale. On the other hand further miniaturization in manufacturing necessitates the control of technological processes at a minimum of one order of magnitude below the aspired device size. The need for rapid and efficient nanoanalysis is growing very quickly. The next generation 22 nm node in microelectronics architecture is approaching.