Mar. 10, 2010

Optical Micro- and Nano- Metrology

To image and measure small structures, forms and surface roughness has become more easy, fast and versatile with the Sensofar PLµ Neox, distributed by the Schaefer-Tec group. The optical profilometers of the PLµ series combine the two complementary measuring techniques of confocal microscopy and interferometry in one and the same instrument. With this, high resolution 3-D imaging and dimensional measurements of nearly all kinds of surfaces are obtained easily and fast. moreDec. 01, 2008

X-ray Reflectometry & AFM on Surfaces with Non-Gaussian Roughness

X-ray Reflectometry & AFM on Surfaces with Non-Gaussian Roughness. V. L. Mironov and colleagues from the Institute for Physics of Microstructures, Nizhniy Novgorod, Russia, carried out theoretical and experimental investigations with the aim of comparing atomic force microscopy (AFM) and x-ray reflectometry (XRR) as methods for characterising surface roughness. It is shown that AFM gives more appropriate information about the surface roughness in comparison to XRR. The method for estimating the parameters that characterise x-ray scattering on the basis of AFM data is developed. more