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Auriga - The New FIB-SEM Workstation
To study the chemical analysis, crystallographic information, the complete morphology, electrical information of various FIB-SEM samples, the Auriga Workstation from Carl Zeiss NTS features redesigned vacuum chamber, which includes a total of 15 ports for different detectors. Additionally, a charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods support numerous applications in materials analysis, life sciences and semiconductor technology.To study the chemical analysis, crystallographic information, the complete morphology, electrical information of various FIB-SEM samples, the Auriga Workstation from Carl Zeiss NTS features redesigned vacuum chamber, which includes a total of 15 ports for different detectors. Additionally, a charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods support numerous applications in materials analysis, life sciences and semiconductor technology.
Authors:
Carl Zeiss NTS GmbH - A Carl Zeiss SMT AG Company
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Keywords: 3D 3D reconstruction Auriga Cross Beam Workstation EBSD EDS Electron Backscatter Diffraction EsB Detector FE-SEM Focused Ion-Beam Gemini Beam column Scanning Electron Microscopy WDS
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