Nov. 17, 2009
Webcast

Highly Flexible CrossBeam Workstation

Auriga - The New FIB-SEM Workstation

To study the chemical analysis, crystallographic information, the complete morphology, electrical information of various FIB-SEM samples, the Auriga Workstation from Carl Zeiss NTS features redesigned vacuum chamber, which includes a total of 15 ports for different detectors. Additionally, a charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods support numerous applications in materials analysis, life sciences and semiconductor technology.To study the chemical analysis, crystallographic information, the complete morphology, electrical information of various FIB-SEM samples, the Auriga Workstation from Carl Zeiss NTS features redesigned vacuum chamber, which includes a total of 15 ports for different detectors. Additionally, a charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods support numerous applications in materials analysis, life sciences and semiconductor technology.

http://www.smt.zeiss.com

 

 

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Carl Zeiss Microscopy GmbH
Carl-Zeiss-Str. 56
73447 Oberkochen, Baden-Württemberg
Germany
Phone: +49 7364 20 22 94
Telefax: +49 7364 20 4970

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