Sep. 24, 2019

Advantages of Vacuum for Electrical Scanning Probe Microscopy

Park NX-Hivac AFM

  • Detail of Park NX-Hivac AFMDetail of Park NX-Hivac AFM
  • Detail of Park NX-Hivac AFM
  • SSRM in Air vs. High Vacuum
  • Park NX-Hivac AFM

Park Systems NX-Hivac allows failure analysis engineers and researchers to improve the sensitivity and resolution of their measurements through high vacuum scanning spreading resistance microscopy (SSRM). Because high vacuum scanning offers greater accuracy and better repeatability than ambient or dry N2 conditions, users can measure a wide range of dope concentration and signal response in failure analysis applications.

Read the complete whitepaper here.



Park Systems Europe GmbH
Janderstrasse 5
68199 Mannheim
Phone: +49 621 490896-50
Telefax: +49 621 490896-66

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