Focused Ion Beam-Scanning Electron Microscopy
Essential Knowledge Briefing
With any kind of work, it helps to be able to see what you’re doing, but that can be a challenge when working at microscopic scales or below.
By taking advantage of a system that combines two separate instruments – a focused ion beam (FIB) and a scanning electron microscope (SEM) – researchers are now able to do just that. They can modify a wide range of materials with the FIB while monitoring the process in real time with the SEM.
This EKB offers an introduction to FIB-SEM, discusses practical issues that need to be considered when working with FIB-SEM, including sample preparation and reducing sample damage.
Additionally, it details several examples of how FIB-SEM is currently being utilized by scientists in their research, and showcases some of the latest developments, including advanced ion sources and combining FIB-SEM with complementary analytical techniques such as super-resolution light and X-ray microscopy.