Raith´s CHIPSCANNER – True Large-Area Image Acquisition
The CHIPSCANNER from Raith uniquely combines high-resolution electron optics, multiple, highly efficient electron detectors and most precise Laser interferometer Stage technology.
It is the perfect large-area imaging SEM solution whenever surfaces of up to cm² areas with nm resolution and excellent layer to layer accuracy need to be scanned, for example in chip reverse engineering, materials science, and life sciences (e.g. connectomics). High-resolution, large-area image mosaics are created by capturing sequential SEM images and stitching them together for further analysis, while the laser interferometer stage and field-of-view calibration minimize overlap and concomitant computing.
Height-sensor-based focus correction, sample pre-leveling technologies and built-in temperature stabilization deliver homogenous large-area image mosaics with smallest stitching errors, resulting in the most accurate, time-saving, large-area, high-resolution images directly acquired by an SEM instrument.