Monolithic XY Piezo Stage Optimized for Microscopy Applications

  • ECSxy5050 – attocube’s new monolithic XY piezo stage ECSxy5050 – attocube’s new monolithic XY piezo stage

attocube's new ECSxy5050 nano drive has been specifically designed for applications which have minimal vertical space available and require maximal decoupling of the X- and Y-motion axes making the stage ideal for e.g. microscopy applications.

The XY piezo stage provides positioning with nm resolution over a travel range of 25x25mm². In addition to its slim design, it features unprecedented perpendicularity between the motion axes, which is especially beneficial for applications like beam steering in two dimensions. The monolithic configuration makes it easy to use and saves time during implementation of the setup. The high guiding accuracy is achieved with crossed roller bearings which also allow for extremely high loads of up to 15 kg.


attocube Systems GmbH
Königinstr. 11 A
80539 Munich
Phone: +49 89 2877809 0
Telefax: +49 89 2877809 19

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